Research
ChEE 413
ChEE 437/537
ChEE 506
ERC
ChEE Dept
U of A

Anthony J. Muscat

Associate Professor
Department of Chemical & Environmental Engineering
University of Arizona
Tucson, AZ 85721 USA

Room: Harshbarger 134D
Telephone: 520-626-6580
Fax: 520-626-5397
E-mail: muscat@erc.arizona.edu

PhD Stanford University, 1993
MSc Stanford University, 1983
BSc University of California, Davis, 1982

Honors and Awards

2005
2003
1998

2004, 2001
1999, 1998

1997-98

da Vinci Circle Fellowship UA College of Engineering
Scientific American 50, Policy Leader in Chemicals and Materials
National Science Foundation Faculty Early Career Development (CAREER) Program

Excellence at the Student Interface, University of Arizona
Department of Chemical & Environmental Engineering

Professor of the Year, Tau Beta Pi, University of Arizona Chapter


Research Interests

Chemistry and physics at solid surfaces including gas phase preparation of interfacial layers and atomic layer deposition on Group IV and III-V semiconductors and supercritical fluid etching, cleaning, and modification of dielectric (low-k) films amd metals.

Alumni

Adam Thorsness, Lam Research (Ph.D. ChemE 2006)
Gerardo Montano, Intel (Ph.D. ChemE 2006)
Hongbin Zhu, Micron (Ph.D. ChemE 2005)
Michael Durando, Boston University M.D./Ph.D. candidate (M.S. ChemE 2005)
Bo Xie, Applied Materials (Ph.D. ChemE 2005)
Sarah Perry, University of Illinois Ph.D. candidate (M.S. ChemE 2005)
Casey Finstad, Texas Instruments (Ph.D. ChemE 2004)